UP-S grade: Suitable for 0.35-0.8 micron IC processing, metal impurity content is less than 1ppb, filtered through 0.05 micron pore size filter, control 0.2 micron particles, filling in the 100 level purified environment to meet SEMI C8 standards.
UP grade: apply to 1 micron IC and TFT-LCD manufacturing process, metal impurity content is less than 10ppb, filtered through 0.2 micron pore size filter, control 0.5 micron particles, filling in a purified environment in the class 100 to meet SEMI C7 standards.
EL level: metal impurity content less than 100ppb, control 1 micron particle size, to meet SEMI C1 C2 standards, suitable for small and medium-sized integrated circuits and electronic components processing technology.
|
项 目 |
指 标 |
||
| EL级 | UP级 |
UP-S级 |
|
|
氢氟酸 (HF), w/% |
49 + 0.5 | 49 + 0.5 | 49 + 0.5 |
|
色度 Color, 黑曾 ≤ |
10 | 10 | 10 |
| 硅氟酸, H2SiF6 ppb ≤ | 100000 | 20000 |
20000 |
| 氯化物, Cl ppb ≤ | 5000 | 5000 |
500 |
|
硝酸盐, NO3 ppb ≤ |
3000 | 3000 | 300 |
| 磷酸盐, PO4 ppb ≤ | 1000 | 1000 |
100 |
|
亚硫酸盐, SO3 ppb ≤ |
5000 | 2000 | 200 |
| 硫酸盐, SO4 ppb ≤ | 500 |
200 |
|
|
铝( Al ) ppb ≤ |
100 | 10 | 1 |
| 砷( As ) ppb ≤ | 50 | 10 |
1 |
|
钡( Ba ) ppb ≤ |
100 | 10 | 1 |
| 铍( Be ) ppb ≤ | 20 | 5 |
1 |
|
铋( Bi ) ppb ≤ |
20 | 5 | 1 |
| 镉( Cd ) ppb ≤ | 50 | 10 |
1 |
|
钙( Ca ) ppb ≤ |
100 | 10 | 1 |
| 铬( Cr ) ppb ≤ | 20 | 10 |
1 |
|
钴( Co ) ppb ≤ |
20 | 10 |
1 |
|
铜( Cu ) ppb ≤ |
20 | 10 | 1 |
| 镓( Ga ) ppb ≤ | 20 | 10 |
1 |
|
锗( Ge ) ppb ≤ |
20 | 10 |
1 |
|
金( Au ) ppb ≤ |
20 | 5 | 1 |
| 铁( Fe ) ppb ≤ | 100 | 10 |
1 |
|
铅( Pb ) ppb ≤ |
50 | 10 | 1 |
| 锂( Li ) ppb ≤ | 20 | 5 |
1 |
|
镁( Mg ) ppb ≤ |
200 | 10 | 1 |
| 锰( Mn ) ppb ≤ | 20 | 10 |
1 |
|
钼( Mo ) ppb ≤ |
100 | 10 | 1 |
| 镍( Ni ) ppb ≤ | 50 | 10 |
1 |
|
钾( K ) ppb ≤ |
100 | 10 | 1 |
| 银( Ag ) ppb ≤ | 20 | 5 |
1 |
|
钠( Na ) ppb ≤ |
200 | 10 | 1 |
| 铂( Pt ) ppb ≤ | 100 | 10 |
1 |
|
锶( Sr ) ppb ≤ |
– | 10 | 1 |
| 铊( Tl ) ppb ≤ | – | 10 |
1 |
|
锡( Sn ) ppb ≤ |
20 | 10 | 1 |
| 锑( Sb ) ppb ≤ | – | 10 |
1 |
|
钛( Ti ) ppb ≤ |
100 | 10 | 1 |
| 矾( V ) ppb ≤ | – | 10 |
1 |
|
锌( Zn ) ppb ≤ |
50 | 10 | 10 |
| 颗粒(≥ 0.5 μm ) 个 /ml ≤ | 25 | 25 |
25 |
|
颗粒(≥ 0.3 μm ) 个 /ml ≤ |
– | 150 | 150 |
| 颗粒(≥ 0.2 μm) 个 /ml ≤ | – | 300 |
300 |
